Chamber WindowsKyocera's ultra-pure sapphire is both plasma and heat resistant.
Kyocera's sapphire material, featuring extremely high purity (up to 99.99%), excellent plasma resistance and heat resistance, and restricted particle occurrence, is used in semiconductor processing equipment parts, including structural components and tools.
- Single-Crystal Sapphire
- Standard Tolerance (mm, nominal dimension: a)
1＞a :±0.05 1≦a≦4 :±0.1 4＜a≦25 :±0.2 25＜a≦102 :±0.25 102＜a≦190 :±0.5 190＜a :±1
- Chamber Windows